Modeling Thermo-electro-mechanical Beams in Sugar
نویسندگان
چکیده
INTRODUCTION Qconv SUGAR is a simulation package for 3D MEMS devices that utilizes nodal analysis techniques [1]. It has been shown that nodal analysis is significantly faster than other simulation techniques and can be just as accurate. The latest version of SUGAR (v2.0) includes various models for 2D and 3D beams, electrical beams, and gap closing actuators [2]. In addition, SUGAR is easily extended through the use of user-defined models. Qrad
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